Course Intro
Course Plan
In the beginning, introduce the processes of IC and TFTLCD industries.
Then, introduce the pollution-control technologies for IC and TFTLCD industries, including the air, wastewater, and deionized water processing.
Textbooks
自編教材
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1IC
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introduction IC process&materials
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Wafer manufacturing
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Photolithography
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Plasma
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2 張豐堂 -半導體IC晶圓及光電TFT-LCD業有機廢氣處理技術(I)
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3 張豐堂 -半導體IC晶圓及光電TFT-LCD業有機廢氣處理技術(II)
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TFT
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IC GAS
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半導體製造業空氣污染管制及排放標準（88.04.07）.
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沸石吸附濃縮焚化系統 (UMC)
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沸石濃縮轉輪
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南科園區廢水流程介紹
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972 IC 污染防治 講義
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重點提示
Teacher / 黃昭銘
Teacher / 工學院
Teacher / 工程學院環工系